ME 6260 — Introduction to Microelectromechanical Systems (MEMS)
4 semester hoursGraduateLecturetypical days: M/WBostonOnlineTraditionalVideo Streaming
Provides an introduction to microelectromechanical systems including principles of sensing and actuation, microfabrication technology for MEMS, noise concepts, and packaging techniques. Covers a wide range of disciplines, from electronics to mechanics, material properties, microfabrication technology, electromagnetics, and optics. Studies several classes of devices including inertial measurement devices, pressure sensors, rf components, and optical MEMS. Devotes the last third of the semester largely to design projects, involving design of MEMS devices to specifications in a realistic fabrication process.
Offering history
| Term | Sections | Enrolled | Capacity | Full | Open seats/section |
|---|---|---|---|---|---|
| Fall 2024 | 2 | 26 | 47 | 55% | 10.5 |
Snapshots from scheduled scrapes — not live seat availability. "Full" can exceed 100% when sections over-enroll.
Meeting times
Share of recent sections by weekday: M 92% · T 0% · W 92% · Th 0% · F 0%
Common patterns: MW (92% of sections), async (8% of sections) — in patterns, R means Thursday
Professors
Fall
- Hongwei Sun (100% of students) · reviews
Percentages are each professor's average share of the season's enrolled students in recent terms.
Links
Official catalog (ME course descriptions) · All ME courses · Plan it at numap.app