EECE 5606 — Micro- and Nanofabrication
4 semester hoursGraduateLectureusually offered: springtypical days: M/WBostonTraditional
Provides an overview of integrated circuit fabrication from the viewpoint of a process engineer. Offers students an opportunity to fabricate micro- and nanoscale devices in integrated lab sessions. Focuses on the physics, chemistry, and technology of integrated circuit fabrication in the lecture portion of the course, while students fabricate and test novel devices (an electrohydrodynamic micropump and three-dimensional carbon nanotube interconnects) in integrated lab sessions. Concentrates on silicon IC technology but also includes examples from other materials and device systems including microelectromechanical (MEMS) technologies that are used to build devices such as accelerometers, pressure sensors, and switches for telecommunications and other current examples provided from nanofabrication and nanotechnology. Lab hours are arranged.
Prerequisites
- one of:
- EECE 2412 (min D-)
- graduate program admission
Offering history
| Term | Sections | Enrolled | Capacity | Full | Open seats/section |
|---|---|---|---|---|---|
| Spring 2024 | 1 | 44 | 45 | 98% | 1.0 |
| Spring 2025 | 1 | 48 | 49 | 98% | 1.0 |
| Spring 2026 | 1 | 41 | 54 | 76% | 13.0 |
Snapshots from scheduled scrapes — not live seat availability. "Full" can exceed 100% when sections over-enroll.
Meeting times
Share of recent sections by weekday: M 100% · T 0% · W 100% · Th 0% · F 0%
Common patterns: MW (100% of sections) — in patterns, R means Thursday
Professors
Spring
- Marco Colangelo (69% of students) · reviews
- Abhishek Singh Dahiya (31% of students)
Percentages are each professor's average share of the season's enrolled students in recent terms.
Links
Official catalog (EECE course descriptions) · Student reviews on RateMyHusky · All EECE courses · Plan it at numap.app