EECE 5161 — Thin Film Technologies
4 semester hoursGraduateLectureusually offered: falltypical days: M/WBostonOakland, CALive CastTraditional
Covers the fundamentals of vacuum technology, thin film deposition technologies, characterization technologies, their applications in different industries, and the frontiers of research activities on thin film deposition technologies. Thin films are fundamental building blocks for integrated circuits chips, microelectromechanical systems (MEMS) devices, and nanoelectromechanical system devices (NEMS), etc., and play critical roles in determining the performance of IC circuits, MEMS, and NEMS devices. Topics include vacuum technologies; vacuum pumps; vacuum system design and analysis; different thin film deposition technologies, including sputtering, chemical vapor deposition, electrochemical deposition, atomic layer deposition, etc.; and different thin film characterization technologies, in particular the magnetic thin film characterization technologies, including VSM, PPMS, FMR, MOKE, etc. Students who do not meet course prerequisites may seek permission of instructor.
Prerequisites
Offering history
| Term | Sections | Enrolled | Capacity | Full | Open seats/section |
|---|---|---|---|---|---|
| Fall 2025 | 2 | 15 | 31 | 48% | 8.0 |
Snapshots from scheduled scrapes — not live seat availability. "Full" can exceed 100% when sections over-enroll.
Meeting times
Share of recent sections by weekday: M 100% · T 0% · W 100% · Th 0% · F 0%
Common patterns: MW (100% of sections) — in patterns, R means Thursday
Professors
Fall
Percentages are each professor's average share of the season's enrolled students in recent terms.
Links
Official catalog (EECE course descriptions) · Student reviews on RateMyHusky · All EECE courses · Plan it at numap.app